广东工业大学教师主页平台管理系统 Jisheng PAN--Home-- (2) Jisheng Pan, Zhijun Chen and Qiusheng Yan. Study on the rheological properties and polishing properties of SiO2@CI composite particle for sapphire wafer. Smart Materials and Structures[J], 2020，29(11). 114003 SCI二区

Jisheng PAN

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(2) Jisheng Pan, Zhijun Chen and Qiusheng Yan. Study on the rheological properties and polishing properties of SiO2@CI composite particle for sapphire wafer. Smart Materials and Structures[J], 2020，29(11). 114003 SCI二区

Release time:2021-03-05 Hits:

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Pre One:(1) Qixiang Zhang, Jisheng Pan *, Xiaowei Zhang, Jiabin Lu, Qiusheng Yan. Tribological behavior of 6H–SiC wafers in different chemical mechanical polishing slurries. Wear[J]. 2021, 472-473(15) , 203649 SCI一区 Next One:(3) Pan J, Zheng K, Yan Q, Zhang Q, Lu J. Optimization study on magnetorheological fluid components and process parameters of cluster magnetorheological finishing with dynamic magnetic field for sapphire substrates[J]. Smart Materials and Structures, 2020 (11).