Jisheng PAN

Doctor of Engineering

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Home > Scientific Research > Paper Publications

(1) Qixiang Zhang, Jisheng Pan *, Xiaowei Zhang, Jiabin Lu, Qiusheng Yan. Tribological behavior of 6H–SiC wafers in different chemical mechanical polishing slurries. Wear[J]. 2021, 472-473(15) , 203649 SCI一区

Release time:2021-03-05 Hits:

Translation or Not:no

Next One:(2) Jisheng Pan, Zhijun Chen and Qiusheng Yan. Study on the rheological properties and polishing properties of SiO2@CI composite particle for sapphire wafer. Smart Materials and Structures[J], 2020，29(11). 114003 SCI二区

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