李明杰

硕士生导师

联系方式：limj@gdut.edu.cn

学科：微电子学与固体电子学

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    • 微纳加工和传感技术，包括基于微机电系统（MEMS）的微型加热器，气体传感器，静电振动能量采集器等。

    • 纳米压印技术，包括图形复制缺陷的机理研究，非晶合金模板的制造，及体微加工在超疏水表面中的应用等。



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    1. Wenjun Yan, Wenxin Luo, and Mingjie Li*, NiO Nanoparticles-Based Gas Sensors: A Novel Pulse-Driven Approach for Enhanced and Efficient Hydrogen Detection, Int. J. Hydrogen Energy 85 481-488 (2024).

    2. Wenxin Luo, Jianhao Li, and Mingjie Li*, MEMS Gas Sensors Based on In2O3-Decorated SnO2 Nanosheets for Aniline Detection, IEEE Sens. J., Early Access (2024).

    3. Mingjie Li, Wenxin Luo, and Wenjun Yan, High Performance H2 Sensors Based on NiO-SnO2 Nanosheets in Temperature-Pulsed Operation Mode, Smart Mater. Struct. 33(6) 06LT01 (2024).

    4. Mingjie Li, Wenxin Luo, and Wenjun Yan, Low Concentration CO Gas Sensor Based on Pulsed-Heating and Wafer-Level Fabricated MEMS Hotplate, IEEE Electron Device Lett. 45(4) 689 - 692 (2024).

    5. Wenjun Yan, Wenxin Luo, Jianhao Li, and Mingjie Li*, Highly Selective MEMS Gas Sensor to Detect H2 and NH3 with Tunable Discrimination, IEEE Sens. J. 24(6) 7473-7481 (2024).

    6. Wenxin Luo, and Mingjie Li*, Recent Advances in Fabrication of Durable, Transparent, and Superhydrophobic Surfaces, Nanomater. 13(16) 2359 (2023).

    7. Mingjie Li, Anxin Luo, Wenxin Luo, Xiaojiang Liu, and Fei Wang, Electrostatic Vibration Energy Harvester with A Self-Rechargeable Electret, IEEE Electron Device Lett. 44(3) 540-543 (2023).

    8. Mingjie Li, Wenxin Luo, Xiaojiang Liu, Gaoqiang Niu, and Fei Wang, Wafer-Level Patterning of SnO2 Nanosheets for MEMS Gas Sensors, IEEE Electron Device Lett. 43(11) 1981-1984 (2022).

    9. Mingjie Li, Anxin Luo, Wenxin Luo, and Fei Wang, Recent Progress on Mechanical Optimization of MEMS Electret-Based Electrostatic Vibration Energy Harvesters, J. Microelectromech. Syst. 31(5) 726-740 (2022).

    10. Wenxin Luo, Jingfu Xu, Gang Li, Gaoqiang Niu, Kar Wei Ng, Fei Wang, and Mingjie Li*, Facile Fabrication of Robust, Anti-reflective, Transparent Superhydrophobic Coatings with a Micropatterned Multilayer Structure, Langmuir 38(23) 7129-7136 (2022).

    11. Mingjie Li, Wenxin Luo, Haoyang Sun, Mingxiang Zhang, Kar Wei Ng, Fei Wang, and Xing Cheng, Low-cost Preparation of Durable, Transparent, Superhydrophobic Coatings with Excellent Environmental Stability and Self-cleaning Function, Surf. Coat. Technol. 438 128367 (2022).

    12. Mingjie Li, Wenxin Luo, Jingfu Xu, Juan Zhang, Kar Wei Ng, and Xing Cheng, Fabrication and Oxidation of Amorphous Zr-based Alloy for Imprint Lithography, Microelectron. Eng. 256 111722 (2022).

    13. Mingjie Li, Wenxin Luo, Haoyang Sun, Jingfu Xu, and Xing Cheng, Superhydrophobic Coatings Fabricated by Paraffin Wax and Silica Nanoparticles with Enhanced Adhesion Stability, Mater. Lett. 309 131316 (2022).

    14. Mingjie Li, Wenxin Luo, Haoyang Sun, Jingfu Xu, Kar Wei Ng, and Xing Cheng, Micropatterned Amorphous Zr-Based Alloy Coated with Silica Nanoparticles as Superhydrophobic Surfaces against Abrasion, ACS Appl. Nano Mater. 4(11) 12300-12307 (2021).

    15. Mingjie Li, Wenxin Luo, Yulong Chen, Yini Zheng, and Xing Cheng, Fabrication and Nanoindentation Characterization of Nickel Micro-pillar Mold for Nanoimprint Lithography, Microelectron. Eng. 250 111636 (2021).

    16. Mingjie Li, Wenxin Luo, Yulong Chen, and Xing Cheng, Nickel Micro-Pillar Mold Produced by Pulse and Pulse-Reverse Current Electrodeposition for Nanoimprint Lithography, Mater. Lett. 301 130310 (2021).

    17. Mingjie Li, Yulong Chen, Wenxin Luo, and Xing Cheng, Durable and Flexible Hydrophobic Surface with Micropatterned Composite Metal-Polymer Structure, Langmuir 37(19) 5838-5845 (2021).

    18. Mingjie Li, Yulong Chen, Wenxin Luo, and Xing Cheng, Interfacial Interactions during Demolding in Nanoimprint Lithography, Micromachines 12(4) 349 (2021).

    19. Mingjie Li, Yulong Chen, Wenxin Luo, and Xing Cheng, Demolding Force Dependence on Mold Surface Modifications in UV Nanoimprint Lithography, Microelectron. Eng. 236 111470 (2021).

    20. Yulong Chen†, Mingjie Li†, Wenjun Yan, Xin Zhuang, Kar Wei Ng, and Xing Cheng, Sensitive and Low-Power Metal Oxide Gas Sensor with Low-Cost Microelectromechanical Heater, ACS Omega 6(2) 1216-1222 (2021).

    21. Mingjie Li, Yulong Chen, Wenxin Luo, and Xing Cheng, Nanoindentation Behavior of UV-curable Resist and Its Correlation with Patterning Defect in Nanoimprint Lithography, J. Micromech. Microeng. 30 065010 (2020).

    22. Mingjie Li, Xinglong Huang, Wenxin Luo, Yulong Chen, Fei Han, and Xing Cheng, Thermal Degradation Behavior of Self-assembled Monolayer Surfactant on Silicon Substrate, J. Vac. Sci. Technol. B 38 032602 (2020).

    23. Mingjie Li, David J. Duquette, and Ying Chen, Deformation Accommodation at Triple Junctions in Columnar-Grained Nickel, Metall. Mater. Trans. A 50 52-57 (2019).



    1. 基于选择性片上生长SnO2纳米片阵列的MEMS气体传感器制造方法研究，广州市基础与应用基础研究专题（青年博士启航项目），2024.1-2025.12，项目负责人

    2. MEMS气体传感器产业化技术，企业横向项目（到校60万），2023.3-2024.11，项目负责人

    3. 高效能量收集技术机理研究，深圳市基础研究重点项目，2022.10-2025.10，子课题负责人

    4. 面向高性能液晶显示的纳米线栅偏振片的制备工艺及设备研究，广东省重点领域研发计划，2020.4-2023.4，参与



    1. 李明杰; 罗文昕; 一种气体识别的方法, 2024-08-27, 中国发明专利，2024111854818

    2. 李明杰; 闫文君; 罗文昕; 一种氢气传感器及其制作方法、及氢气测量方法, 2024-07-05, 中国发明专利，2024108961528

    3. 李明杰; 袁剑敏; 罗文昕; 李健豪; 许勇; 一种气敏材料及其制备方法与在检测苯胺气体中的应用，2024-03-05, 中国发明专利（已公开），202410247687.2

    4. 李明杰; 罗文昕; 一种MEMS 气体传感器及其制作方法, 2023-12-15, 中国发明专利（已公开），202311728439.1

    5. 李明杰; 闫文君; 罗文昕; 一种MEMS气体传感器及其制备方法、气体检测方法, 2023-11-14, 中国发明专利（已公开），202311507990.3

    6. 汪飞; 李明杰; 罗文昕; 气体传感器及其制备方法, 2022-08-03, 中国发明专利（已公开）, 202210929192.9

    7. 程鑫; 李明杰; 陈宇龙; 罗文昕; 疏水复合材料及其制备方法和应用, 2022-07-29, 中国发明专利（已授权）, CN202110454218.4

    8. 程鑫; 陈宇龙; 李明杰; MEMS微热板的制备方法及MEMS微热板, 2020-10-20, 中国发明专利（已公开）, 202011124990.1