李明杰

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Personal Information

Supervisor of Master's Candidates

  • School/Department:

    集成电路学院
  • Contact Information:

    limj@gdut.edu.cn
  • Teacher College:

    集成电路学院
  • Discipline:

    微电子学与固体电子学

Other Contact Information:

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Current position: Home > Scientific Research

Fabrication and Oxidation of Amorphous Zr-based Alloy for Imprint Lithography

  • Release time:2023-03-25
  • Hits:
  • DOI number:  

    10.1016/j.mee.2022.111722
  • Journal:  

    Microelectronic Engineering
  • Indexed by:  

    Journal paper
  • Issue:  

    256
  • Page Number:  

    111722
  • Translation or Not:  

    no
  • Date of Publication:  

    2022-02-15
  • Included Journals:  

    SCI