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Date of Employment:2017-12-04

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[4] MY Chen, SL Pang , JL Zhou, H Wu, H Matsumoto, K Takamasu. High-accuracy spectral interferometer with multi-Fabry–Perot Etalon for thickness measurement of the silicon wafer[J]. Optics Communications, 2021,501,127346.(Q2)

Release time:2022-12-04 Hits:

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